File:Extreme ultraviolet lithography tool.jpg

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	Date/Time	Thumbnail	Dimensions	User	Comment
current	18:19, 22 September 2011		713 × 605 (80 KB)	Bomazi	{{Information \|Description ={{en\|1=EUVL tool, that deposits virtually defect-free, ultra-thin films on integrated circuits.}} \|Source =''Laser Programs, the first 25 years, 1972-1997'', available from [http://www.osti.gov/bridge/product.biblio.

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